Flow Transmitters

Securing the Future of Semiconductor Fabrication

The semiconductor landscape in the United States is undergoing a historic expansion. With Taiwan Semiconductor (TSMC) and Intel breaking ground in Arizona, Intel’s massive investment in Columbus, Ohio, and Texas Instruments’ growth in the South, the demand for “Ultra High Pure” (UHP) infrastructure has never been higher.

Thermal Instrument Company provides the critical flow measurement technology required to support these facilities. Our Model 600-9UHP is specifically engineered to meet the stringent cleanliness and precision standards of modern chip manufacturing, ensuring that the production gases powering the digital revolution remain uncontaminated and accurately metered.

In the semiconductor industry, gases are often as expensive as the silicon they process. Gases like Silane, Argon, Nitrogen, and Ultra-High-Purity (UHP) Hydrogen are critical to the deposition and etching phases of manufacturing. For over 30 years, Thermal Instrument Company has provided the specialized mass flow solutions required to manage these costly resources. With our unique redundant sensor design and UHP-grade surface  finishes, our meters are the standard for accuracy and provide years of service and Return on Investment (ROI) at the world’s leading fabrication facilities.

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Trusted by Global Leaders

Our thermal mass flow technology is integrated into the most sophisticated manufacturing environments on the planet. Thermal Instrument meters are currently operational at:

• Top Manufacturers: Texas Instruments, Samsung, GlobalFoundries, and Micron.
• Industry Suppliers: TSMC, Air Liquide, and other critical infrastructure partners.

The Precision Challenge in UHP Gas Delivery

Semiconductor fabrication relies on the delivery of ultra-clean production gases. Any obstruction or roughness in the flow path can lead to particulate buildup, pressure drops, or chemical contamination—all of which are “yield killers.”

Thermal Instrument Model 600-9UHP Solution:

The Model 600-9UHP is designed to address these challenges head-on:

• Unobstructed Flow Path: Our “straight-through” design eliminates internal components that could trap particles or cause turbulence.
• Superior Surface Finish: We provide a 15 Ra surface finish or better on all wetted surfaces, ensuring a smooth, mirror-like path that prevents gas stagnation and contamination.
• Negligible Pressure Drop: Because the meters are sized exactly to your existing lines, there is virtually no loss in pressure, maintaining the integrity of sensitive delivery systems.
• The only mass flow meters in the industry featuring redundant flow and temperature sensors. If a sensor fails, the redundant sensor is there and can take over, preventing costly process interruptions and improving ROI.
• Custom Calibration: Unlike “off-the-shelf” sensors, every Thermal Instrument meter is custom-manufactured and calibrated to the customer’s specific gas mixture and environmental requirements.

Versatility Across the Fab

From micro-dosing to bulk gas delivery, the Model 600-9UHP scales to meet the specific needs of different stages of production:

Beyond the Clean Room: Total Facility Solutions

While UHP gases are the lifeblood of the “front-end” process, Thermal Instrument mass flow meters are utilized throughout the entire facility to optimize operations:

• Compressed Air Management: Accurate monitoring of facility-wide compressed air to reduce energy waste.
• Natural Gas Sub-metering: Precise measurement for power generators and boilers critical to maintaining 24/7 production uptime.
• Cooling Systems: Monitoring water or gas flow in cooling loops to ensure expensive equipment operates within safe thermal margins.

Conclusion: A Trusted Partner in American Innovation

As the U.S. semiconductor industry scales, the need for a reliable, full-service measurement solution provider is paramount.

In alignment with the spirit of the CHIPS Act of 2022, Thermal Instrument remains steadfast in our commitment to revitalizing American manufacturing from our home in Trevose, PA. By sourcing from a network of premier suppliers within a 50-mile radius of the Philadelphia area, we ensure that every flow meter is not only made in the USA but built to support the local economy and small business initiatives. Our localized approach allows us to maintain total oversight of the manufacturing and NIST-traceable calibration processes, providing our partners with the high-precision instruments and domestic reliability necessary to power the next generation of American industry.

About Thermal Instrument Company

Thermal Instrument Company (TIC), established in 1959, headquartered in Trevose, Pennsylvania, provides leading edge instrumentation solutions for measuring the mass flow rate of liquids and gases.  TIC has been providing flow measurement solutions for more than 60 years to a variety of industries across the globe, and has an installed base in excess of 20,000 thermal mass flow measurement devices. TIC has provided flow measurement solutions for: Landfill Gas and Methane from Landfill and Wastewater sites; Natural Gas to boilers, furnaces, and in pipelines; Clean gases used in manufacturing processes; Water for cooling and pharmaceutical applications; and numerous other liquids and gasses used in environmental and industrial processes. TIC offers a full line of thermal mass flow meters and flow switches available in either an unobstructed path in-line model, or as an insertion probe model. For more information about Thermal Instrument Company’s flow measurement solutions, please visit our website or contact one of our sales representatives.

https://www.thermalinstrument.com/

For decades, Thermal Instrument Company, based in Trevose, Pennsylvania, has been at the forefront of industrial gas measurement solutions. What started in 1959 in Fred Curran’s basement has grown into a trusted, family- and veteran-run small business that designs, manufactures, and calibrates high-quality mass flow meters right here in the USA. Our equipment has been used in industries ranging from power generation to plastics manufacturing, but one area where our expertise is making a significant environmental and economic impact is in the Renewable Natural Gas (RNG) sector.

From Flares to Fuel: A Changing Approach to Landfill Gas

Historically, many landfill sites managed the gases produced from decomposing waste, primarily methane (CH₄) and carbon dioxide (CO₂), by capturing the mixture and burning it off at flares. This reduced harmful emissions, but it also left valuable energy literally going up in smoke.

As technology and environmental initiatives advanced, a shift began. Instead of destroying the gas, landfill operators now clean and refine it to isolate pure methane. This scrubbing process removes CO₂, particulates, condensation, volatile organic compounds (VOCs), and other contaminants. What remains is pipeline-quality renewable natural gas, a clean, marketable energy source that can be injected into the national gas grid, used to power equipment onsite, or both.

RNG production not only provides a valuable commodity but also generates carbon credits, offering landfill owners an additional revenue stream while reducing environmental impact.

RNG Beyond Landfills

While landfills remain a key source of RNG, the process is now being applied to other methane-rich sources, including:

• Abandoned coal mines capturing methane emissions

• Food processing facilities reclaiming gas from waste byproducts

• Wastewater treatment plants converting digester gas into usable fuel

These operations all share the same challenge: accurately and reliably measuring gases before, during, and after processing. That’s where Thermal Instrument’s mass flow meters excel.

Where Thermal Instrument Fits In

Our thermal mass flow meters are already in use at numerous RNG facilities across the country, helping operators optimize performance and meet regulatory requirements. Here’s how we help at every stage:

1. Measuring Raw Gas Before Processing

Before the scrubbing process begins, our meters can be calibrated to very specific gas mixtures, ensuring accuracy even with challenging compositions. This is critical for baseline measurements, system design, and compliance documentation.

2. Monitoring Finished RNG

Once the methane is cleaned and pressurized, it must meet strict quality and flow standards before entering a pipeline or fueling onsite equipment. Our meters deliver precise, repeatable readings that help operators verify production output, track performance, and ensure contractual obligations are met.

3. Measuring CO₂ and Other Byproducts

In RNG production, waste streams still matter. By accurately measuring CO₂ and other off-gases, operators can improve process efficiency, confirm environmental compliance, and document emissions reductions for carbon credit verification.

Built for Harsh Conditions

RNG environments are tough; corrosive gases, moisture, and particulates can challenge standard equipment. That’s why Thermal Instrument Company’s flow meters are designed for durability:

• Special alloy construction withstands aggressive chemical exposure.

• Backup sensors built into each unit extend operational life and maximize return on investment.

• Proven performance in industries that demand rugged reliability, from oil refineries to wastewater treatment.

Staying Accurate for the Long Haul

Flow measurement accuracy can drift over time, but downtime is costly. That’s why we offer a comprehensive recalibration program to keep meters in peak condition:

• Factory recalibration for complete verification and adjustments

• Loaner meters available to keep operations running while your unit is serviced

• Field service calibration under appropriate site conditions to minimize disruption

This commitment to long-term accuracy ensures RNG facilities can maintain compliance, maximize efficiency, and avoid costly production interruptions.

Why RNG Producers Choose Thermal Instrument

The success of RNG projects depends on precision, reliability, and responsiveness, all qualities we’ve built our business on for over 60 years. Our local manufacturing model means we control every step of the process, working with suppliers within a 50-mile radius to ensure quality, rapid customization, and on-time delivery. When RNG operators call, we respond quickly, because downtime isn’t an option.

Whether it’s measuring raw landfill gas, monitoring purified methane headed for a natural gas pipeline, or quantifying CO₂ for emissions reporting, Thermal Instrument’s mass flow meters give RNG producers the accuracy, durability, and peace of mind they need to operate successfully in a growing renewable energy market.

If you’re an RNG facility operator, landfill gas manager, or part of a wastewater or food processing operation looking to maximize the value of your gas streams, contact Thermal Instrument Company today. Our experts will help you choose the proper flow meter for your application and keep your system running smoothly for years to come.

Thermal Instrument Company
217 Sterner Mill Road
Trevose, PA 19053
www.ThermalInstrument.com
P: 215-355-8400 | F: 215-355-1789

About Thermal Instrument Company

Thermal Instrument Company (TIC), established in 1959, headquartered in Trevose, Pennsylvania, provides leading edge instrumentation solutions for measuring the mass flow rate of liquids and gases.  TIC has been providing flow measurement solutions for more than 60 years to a variety of industries throughout the globe, and has an installed base in excess of 20,000 thermal mass flow measurement devices. TIC has provided flow measurement solutions for: natural gas to boilers, furnaces, and in pipelines; clean gases used in manufacturing processes; methane and landfill gas from wastewater and landfill sites; water for cooling and pharmaceutical applications; and numerous other liquids and gasses used in environmental and industrial processes. TIC offers a full line of thermal mass flow meters and flow switches available in either an unobstructed path in-line model, or as an insertion probe model. For more information about Thermal Instrument Company’s flow measurement solutions, please visit our website or contact one of our sales representatives.

https://www.thermalinstrument.com/

Installed Model 62-9/9500P Insertion Probe

Over the years our technicians have fielded numerous questions about meter performance and many of those solutions come back to some common installation mistakes. When it comes to Thermal Instrument Mass Flow Meters there are a couple things that you can check very easily when you experience a problem or suspect something is not 100% accurate with the measurement values. Here are a couple of suggestions from our technicians to common questions we receive.

Scenario: I know I have flow, but Flow Meter is not measuring anything.

Solution:

Check to make sure that the insertion probe flow meter is properly inserted into the line to the correct depth. With Thermal Instrument Model 62-9 insertion probes, the sensors are located on the bottom 3” section of the probe closest to the tip. Make sure that the tip of the probe is inserted to the proper depth depending upon the line size. Ideally you want that sensor right in the middle of the flow profile. Additionally, check all your connections and make sure that the meter is powered on and that the output cables are securely attached at the transmitter.

Scenario: As my flow rate increases, the meter seems to be consistently reading lower

Solution:

First, make sure that the sensors are facing into the flow stream. Thermal Instrument marks each Model 62-9 with a Flow Direction Arrow just underneath the transmitter condulet. Make sure that the arrow is facing in the same direction as the flow. Next, if you are running an application that is dirty or has particulates in the flow stream, check to make sure that the sensor area does not have a coating on the meter. Our meters are designed so that they can be removed from the line (please make sure you follow local safety regulations) and then simply wipe any buildup off of the probe that may have accumulated down at the bottom where the sensors are located.

For more information visit our FAQ page or feel free to contact us to speak with one of our technicians. Phone: 215-355-8400 then Option 3 on phone menu for Tech Support.

Thermal Instrument Company
217 Sterner Mill Road
Trevose, PA 19053
www.ThermalInstrument.com
P: 215-355-8400 | F: 215-355-1789

About Thermal Instrument Company

Thermal Instrument Company (TIC), established in 1959, headquartered in Trevose, Pennsylvania, provides leading edge instrumentation solutions for measuring the mass flow rate of liquids and gases.  TIC has been providing flow measurement solutions for more than 60 years to a variety of industries throughout the globe, and has an installed base in excess of 20,000 thermal mass flow measurement devices. TIC has provided flow measurement solutions for: natural gas to boilers, furnaces, and in pipelines; clean gases used in manufacturing processes; methane and landfill gas from wastewater and landfill sites; water for cooling and pharmaceutical applications; and numerous other liquids and gasses used in environmental and industrial processes. TIC offers a full line of thermal mass flow meters and flow switches available in either an unobstructed path in-line model, or as an insertion probe model. For more information about Thermal Instrument Company’s flow measurement solutions, please visit our website or contact one of our sales representatives.

https://www.thermalinstrument.com/

Our flow measurement instrumentation is used around the world to help our customers measure processes and provide accurate reporting. With the renewed safety certification in place and the commitment to continuous improvement from Thermal Instrument Company (TIC), our customers can have the continued confidence to install our instrumentation in the tough applications we have been known for.

TIC continues to look for ways to offer more features to keep our instrumentation up to the challenges. The insertion probe style sensor teamed up with the 9500P transmitter can be installed in both gas and liquid applications for flow measurement. This is truly a unique feature made possible by the TIC engineered sensor. The 9500P Transmitter offers a standard 2 Line Display, 4-20mA Flow Output, Optional 4-20 mA Temperature output, Micro-USB Software Connection, RS485 Modbus, Hart, and Pulse outputs to name a few. New features are always in development, and we will be making more announcements in the future.

Thermal Instrument Company
217 Sterner Mill Road
Trevose, PA 19053
www.ThermalInstrument.com
P: 215-355-8400 | F: 215-355-1789

About Thermal Instrument Company

Thermal Instrument Company (TIC), established in 1959, headquartered in Trevose, Pennsylvania, provides leading edge instrumentation solutions for measuring the mass flow rate of liquids and gases.  TIC has been providing flow measurement solutions for more than 60 years to a variety of industries throughout the globe, and has an installed base in excess of 20,000 thermal mass flow measurement devices. TIC has provided flow measurement solutions for: natural gas to boilers, furnaces, and in pipelines; clean gases used in manufacturing processes; methane and landfill gas from wastewater and landfill sites; water for cooling and pharmaceutical applications; and numerous other liquids and gasses used in environmental and industrial processes. TIC offers a full line of thermal mass flow meters and flow switches available in either an unobstructed path in-line model, or as an insertion probe model. For more information about Thermal Instrument Company’s flow measurement solutions, please visit our website or contact one of our sales representatives.

https://www.thermalinstrument.com/

• For years our products have stood up to the harshest conditions

• Our products have been reliable and robust

• Now we have the formal backing from an accredited organization

We recently enhanced our Model 9500P Electronic Transmitter communication port. In the past, the communication port was a RS232 style that required a USB adaptor and a ribbon cable supplied by Thermal Instrument in order to perform any changes to the meter setup. That has now been replaced with a Micro-USB connection that will allow for the communication, when required, to take place. A Micro-USB connection is very common and most people probably have these sitting around the house or tucked away in a desk drawer, as they have been a standard connection cable for charging devices such as phones and other electronic items for years.

The new connection is simple in that you can plug into a PC or Laptop, that has our software package installed, and make simple changes to the meter set up as necessary.

Some of those changes are:

• Lowering the 20mA Flow value to improve resolution of the meter

• Adding decimal points to either the instantaneous Flow Rate Display line or the Totalized Flow Rate Display

• Changing a K factor if needed

• Adjusting the Zero Point Cutoff factor

• Making Address changes if using a RS485 Modbus equipped meter

Our tech support team is available to assist you with any of these changes or discuss in further detail.

The 9500P Electronic Flow Transmitter, one of our most popular electronic options, is available as both an Integral or Remote mounted option. In a Remote configuration, it can be placed as far away as 2000’ with the necessary cabling. It has a standard internally powered 4-20mA flow output and 2 line display. The transmitter can be powered by AC or 24 VDC power for ease of installation. We also offer a variety of additional outputs such as Pule, Hart, and RS485 Modbus. The 9500P can be equipped with a second and  independent 4-20mA output for Temperature as well.

Additionally, our software package continues to be updated with regards to functionality and security. Our software has a security certificate applied to it to minimize any delays in install or updating.

If you need to have any questions, please contact Thermal Instrument and we can review your situation in more detail.

About Thermal Instrument Company

Thermal Instrument Company, headquartered in Trevose, Pennsylvania, provides leading edge instrumentation solutions for measuring the flow rate of liquids and gases. Established in 1959, providing flow measurement solutions to a variety of industries throughout the globe. An installed base in excess of 20,000 thermal mass flow measurement devices performing successfully in many applications. For more information about Thermal Instrument Company’s flow solutions, please visit our website or contact us via phone.

www.thermalinstrument.com

215-355-8400

Installed Model 62-9/9500P Insertion Probe

Over the years our technicians have fielded numerous questions about meter performance and many of those solutions come back to some common installation mistakes. When it comes to Thermal Instrument Mass Flow Meters there are a couple things that you can check very easily when you experience a problem or suspect something is not 100% accurate with the measurement values. Here are a couple of suggestions from our technicians to common questions we receive.

Scenario: I know I have flow, but Flow Meter is not measuring anything.

Solution:

Check to make sure that the insertion probe flow meter is properly inserted into the line to the correct depth. With Thermal Instrument Model 62-9 insertion probes, the sensors are located on the bottom 3” section of the probe closest to the tip. Make sure that the tip of the probe is inserted to the proper depth depending upon the line size. Ideally you want that sensor right in the middle of the flow profile. Additionally, check all your connections and make sure that the meter is powered on and that the output cables are securely attached at the transmitter.

Scenario: As my flow rate increases, the meter seems to be consistently reading lower

Solution:

First, make sure that the sensors are facing into the flow stream. Thermal Instrument marks each Model 62-9 with a Flow Direction Arrow just underneath the transmitter condulet. Make sure that the arrow is facing in the same direction as the flow. Next, if you are running an application that is dirty or has particulates in the flow stream, check to make sure that the sensor area does not have a coating on the meter. Our meters are designed so that they can be removed from the line (please make sure you follow local safety regulations) and then simply wipe any buildup off of the probe that may have accumulated down at the bottom where the sensors are located.

For more information visit our FAQ page or feel free to contact us to speak with one of our technicians. Phone: 215-355-8400 then Option 3 on phone menu for Tech Support.

Thermal Instrument Company
217 Sterner Mill Road
Trevose, PA 19053
www.ThermalInstrument.com
P: 215-355-8400 | F: 215-355-1789

About Thermal Instrument Company

Thermal Instrument Company (TIC), established in 1959, headquartered in Trevose, Pennsylvania, provides leading edge instrumentation solutions for measuring the mass flow rate of liquids and gases.  TIC has been providing flow measurement solutions for more than 60 years to a variety of industries throughout the globe, and has an installed base in excess of 20,000 thermal mass flow measurement devices. TIC has provided flow measurement solutions for: natural gas to boilers, furnaces, and in pipelines; clean gases used in manufacturing processes; methane and landfill gas from wastewater and landfill sites; water for cooling and pharmaceutical applications; and numerous other liquids and gasses used in environmental and industrial processes. TIC offers a full line of thermal mass flow meters and flow switches available in either an unobstructed path in-line model, or as an insertion probe model. For more information about Thermal Instrument Company’s flow measurement solutions, please visit our website or contact one of our sales representatives.

https://www.thermalinstrument.com/